Scattering Analysis Equipment - メーカー・企業と業務用製品 | イプロスものづくり

[RBS] Rutherford Backscattering Spectrometry

It is a method for measuring the energy and intensity of ions scattered backward by Rutherford scattering after irradiating a solid sample with an ion beam.

RBS is a method that irradiates solid samples with ion beams (H+, He++) and measures the energy and intensity of ions scattered backward through Rutherford scattering. By measuring the kinetic energy of the scattered He ions and examining the mass number of the colliding atoms, it is possible to evaluate the components and layer structure of the analyzed sample. Additionally, by directing He ions at a solid sample and measuring the H ions scattered forward, it is also possible to assess the hydrogen concentration in the sample. This measurement technique is known as Hydrogen Forward-Scattering Spectroscopy (HFS). It is also referred to as Elastic Recoil Detection Analysis (ERDA). - Analysis of elements from B to U is possible (H is also possible through HFS) - Quantitative analysis can be performed without using standard samples - Depth profile of composition distribution can be obtained - Density can be calculated from film thickness information obtained by other methods - Sensitivity and accuracy tend to increase with heavier elements - Non-destructive analysis